Nano Fabrication

Process:

• Synthesis of 1-Dimensional Nano-materials (carbon nanotubes, GaN and ZnO),
• Nanostructure Manipulation
• Optical lithography
• Soft-Lithography
• Electron Beam Lithography (EBL)
• Photo-Mask Fabrication
• Focused Ion Beam milling/deposition (FIB)
• Reactive Ion Etching (RIE)
• Inductively Coupled Plasma (ICP RIE)
• Bosch Processes (DRIE)
• Wet Etching
• Sputtering
• Thermal Evaporation
• E-beam Evaporation
• Chemical Vapor Deposition (LPCVD)
• Plasma Enhanced Chemical Vapor Deposition (PECVD)
• Atomic Layer Deposition (ALD)
• Thermal Oxidation, Diffusion
• Wafer Bonding
• Chemical Mechanical Polishing

Characterization:

• Scanning Electron Microscopy (SEM)
• Energy-Dispersive Spectrometry (EDS)
• X-Ray Diffraction (XRD)
• X-Ray Photoelectron Spectroscopy (XPS)
• Atomic Force Microscopy (AFM)
• Four-Point Probe
• Ellipsometry